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US10001421B2

Method for fabricating a pressure sensor

University of Texas System

Abstract

A method of fabricating a pressure sensor is disclosed. Initially, a first metal is deposited on top of a substrate, and the first metal is patterned accordingly. A PVDF-TrFE nano fiber is then deposited on top of the first metal layer, and the PVDF-TrFE nano fiber is etched. A second metal layer …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Tushar Sharma
Priority date
October 25, 2013
Filing date
October 24, 2014
Grant date
June 19, 2018
Publication date
June 19, 2018
Language
en
Metadata fetched
August 29, 2026 00:26