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US10167410B2

Using chemical vapor deposited films to control domain orientation in block …

University of Texas System

Abstract

Vacuum deposited thin films of material are used to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and influences the orientation of domains in the block …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
C. Grant Wilson
Priority date
February 10, 2012
Filing date
April 28, 2015
Grant date
January 01, 2019
Publication date
January 01, 2019
Language
en
Metadata fetched
August 29, 2026 00:25