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US11561421B2

Systems and methods for integrating a-axis oriented barium titanate thin films …

University of Texas System

Abstract

Various embodiments of the present technology enable growth of a-axis oriented barium titanate (BTO) films by inserting a relaxed strain control layer having a larger lattice constant than the c-axis of BTO and a similar thermal expansion mismatch. As a result, in-plane tensile stress causes BTO …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Alexander A. Demkov
Priority date
June 25, 2019
Filing date
June 25, 2020
Grant date
January 24, 2023
Publication date
January 24, 2023
Language
en
Metadata fetched
August 29, 2026 00:30