US11973441B2

MEMS nanopositioner and method of fabrication

University of Texas System

Abstract

A microelectromechanical (MEMS) device is provided. The MEMS device comprises a substrate and a movable structure flexurally connected to the substrate, capable of moving in relation to the substrate, wherein the movable structure further comprising two or more segments having at least one …

University: University of Texas System
Assignee: Board Of Regents, The University Of Texas System
Inventor: Seyed Omid Reza Moheimani
Priority date: December 18, 2020
Filing date: December 20, 2021
Grant date: April 30, 2024
Publication date: April 30, 2024
Language: en
PDF source: https://patentimages.storage.googleapis.com/ea/0c/60/8a23cad37af088/US11973441.pdf
Metadata fetched: August 29, 2026 00:32