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US12007695B2

Rapid large-scale fabrication of metasurfaces with complex unit cells

University of Texas System

Abstract

A method of fabricating a metasurface comprises coating a photoresist film onto a substrate and loading the coated substrate into a laser interference lithography setup, exposing the photoresist film via a laser with a first interference pattern, the first interference pattern having a first …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Robert Magnusson
Priority date
January 15, 2020
Filing date
January 15, 2021
Grant date
June 11, 2024
Publication date
June 11, 2024
Language
en
Metadata fetched
August 29, 2026 00:32