← All patents

US12168244B2

Nanoscale thin film deposition systems

University of Texas System

Abstract

A method and system for nanoscale precision programmable profiling on substrates. Profiling material is dispensed on a substrate or a superstrate. The superstrate is brought in contact with the substrate. The profiling material is then cured after bringing the superstrate in contact with the …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Sidlgata V. Sreenivasan
Priority date
February 25, 2020
Filing date
February 25, 2021
Grant date
December 17, 2024
Publication date
December 17, 2024
Language
en
Metadata fetched
August 29, 2026 00:32