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US12571958B2

Integrated oxide device

University of Texas System

Abstract

Various embodiments provide for systems and techniques for the successful fabrication of metal oxide (TMO)-on-glass layer stacks via direct deposition. The resulting samples feature epitaxial, strontium titanate (STO) or barium titanate (BTO) films on silicon dioxide (SiO 2 ) layers, forming STO- or …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Alexander A. Demkov
Priority date
October 29, 2019
Filing date
April 29, 2022
Grant date
March 10, 2026
Publication date
March 10, 2026
Language
en
Metadata fetched
August 29, 2026 00:38