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US20030116792A1

Submicron MOSFET having asymmetric channel profile

University of Texas System

Abstract

A MOSFET semiconductor device having an asymmetric channel region between the source region and the drain region. In one embodiment, the device comprises a mesa structure on a silicon substrate with the source region being in the substrate and the mesa structure extending from the source region …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Xiangdong Chen
Priority date
December 20, 2001
Filing date
October 01, 2002
Publication date
June 26, 2003
Language
en
Metadata fetched
August 28, 2026 23:57