US20050064344A1

Imprint lithography templates having alignment marks

University of Texas System

Abstract

One embodiment of the present invention is an imprint template for imprint lithography that comprises alignment marks embedded in bulk material of the imprint template.

University: University of Texas System
Assignee: University Of Texas System Board Of Regents
Inventor: Todd Bailey
Priority date: September 18, 2003
Filing date: September 18, 2003
Publication date: March 24, 2005
Language: en
PDF source: https://patentimages.storage.googleapis.com/40/08/38/78976255a3781c/US20050064344A1.pdf
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