← All patents

US20050236739A1

Step and flash imprint lithography

University of Texas System

Abstract

A method of forming a relief image in a structure comprising a substrate and a transfer layer formed thereon comprises covering the transfer layer with a polymerizable fluid composition, and then contacting the polymerizable fluid composition with a mold having a relief structure formed therein …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Carlton Willson
Priority date
March 11, 1999
Filing date
February 22, 2005
Publication date
October 27, 2005
Language
en
Metadata fetched
August 28, 2026 23:57