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US20060145398A1

Release layer comprising diamond-like carbon (DLC) or doped DLC with tunable …

University of Texas System

Abstract

The present invention pertains to disposing a diamond-like composition on a template, wherein the diamond-like composition acts as a release layer. The diamond-like composition is substantially transparent to actinic radiation, e.g., ultraviolet (UV) light, and will also have a desired surface …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Todd Bailey
Priority date
December 30, 2004
Filing date
December 30, 2004
Publication date
July 06, 2006
Language
en
Metadata fetched
August 29, 2026 00:17