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US20070262363A1

Low temperature fabrication of discrete silicon-containing substrates and …

University of Texas System

Abstract

Fabrication methods and processes are described, the methods and processes occurring at a low-temperature and involving passivation. The methods and processes easily incorporate annealing, deposition, patterning, lithography, etching, oxidation, epitaxy and chemical mechanical polishing for …

University
University of Texas System
Assignee
Board Of Regents, University Of Texas System
Inventor
Meng Tao
Priority date
February 28, 2003
Filing date
April 19, 2007
Publication date
November 15, 2007
Language
en
Metadata fetched
August 29, 2026 00:18