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US20080230959A1

Compositions for Dark-Field Polymerization and Method of Using the Same for …

University of Texas System

Abstract

The present invention provides a composition and a method of using the same to form a pattern on a substrate using imprint lithography employing dark-field polymerization. To that end, the composition includes a bis vinyl ether component, and an initiator component that produces an acid in …

University
University of Texas System
Assignee
Board Of Regents, University Of Texas System
Inventor
C. Grant Willson
Priority date
December 12, 2002
Filing date
April 18, 2008
Publication date
September 25, 2008
Language
en
Metadata fetched
August 29, 2026 00:18