US20090214689A1

Imprint Lithography Templates Having Alignment Marks

University of Texas System

Abstract

One embodiment of the present invention is an imprint template for imprint lithography that comprises alignment marks embedded in bulk material of the imprint template.

University: University of Texas System
Assignee: Board Of Regents, The University Of Texas System
Inventor: Todd C. Bailey
Priority date: July 16, 2001
Filing date: May 07, 2009
Publication date: August 27, 2009
Language: en
PDF source: https://patentimages.storage.googleapis.com/b9/d4/47/44a980551adc95/US20090214689A1.pdf
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