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US20100119708A1

Filling structures of high aspect ratio elements for growth amplification and …

University of Texas System

Abstract

The present invention includes compositions, devices and methods for filling structures of high aspect ratio elements for growth amplification and device fabrication. A method includes a method of filling a structure comprising the steps of providing one or more structures, each structure having a …

University
University of Texas System
Assignee
Board Of Regents The University Of Texas System
Inventor
Lawrence J. Overzet
Priority date
March 28, 2006
Filing date
March 28, 2006
Publication date
May 13, 2010
Language
en
Metadata fetched
August 29, 2026 00:19