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US20100120251A1

Large Area Patterning of Nano-Sized Shapes

University of Texas System

Abstract

Methods for creating nano-shaped patterns are described. This approach may be used to directly pattern substrates and/or create imprint lithography molds that may be subsequently used to directly replicate nano-shaped patterns into other substrates in a high throughput process.

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Sidlgata V. Sreenivasan
Priority date
November 13, 2008
Filing date
November 12, 2009
Publication date
May 13, 2010
Language
en
Metadata fetched
August 29, 2026 00:19