← All patents

US20110229806A1

Phase mask and method of fabrication

University of Texas System

Abstract

A method of fabricating a two-layer phase mask comprises subjecting a photoresist material to two overlapping laser beams that create light and dark fringes in the overlapping beam regions. The photoresist can comprise a liquid crystal and a photo-sensitive material, including, for example, a …

University
University of Texas System
Assignee
The Board Of Regents Of The University Of Texas System
Inventor
Yuankun Lin
Priority date
July 16, 2008
Filing date
July 16, 2009
Publication date
September 22, 2011
Language
en
Metadata fetched
August 29, 2026 00:20