← All patents

US20110262860A1

Novel dual-tone resist formulations and methods

University of Texas System

Abstract

Dual tone photoresist formulations comprising a photoacid generator are described and employed in fabrication techniques, including methods of making structures on substrates, and more particularly, methods of making electronic devices (e.g. transistors and the like) on flexible substrates wherein …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas
Inventor
C. Grant Willson
Priority date
April 22, 2010
Filing date
April 20, 2011
Publication date
October 27, 2011
Language
en
Metadata fetched
August 29, 2026 00:20