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US20120133078A1

Step and Flash Imprint Lithography

University of Texas System

Abstract

CROSS-REFERENCE TO RELATED APPLICATIONS The present application is a continuation of U.S. patent application Ser. No. 11/062,420 filed Feb. 22, 2005, which is a continuation of U.S. patent application Ser. No. 10/978,285 filed Oct. 29, 2004, which is a continuation of U.S. patent application Ser.

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Carlton Grant Willson
Priority date
March 11, 1999
Filing date
February 01, 2012
Publication date
May 31, 2012
Language
en
Metadata fetched
August 29, 2026 00:20