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US20120214066A1

High Aspect Ratio Patterning of Silicon

University of Texas System

Abstract

A silicon nanowire array including a multiplicity of silicon nanowires extending from a silicon substrate. Cross-sectional shape of the silicon nanowires and spacing between the silicon nanowires can be selected to maximize the ratio of the surface area of the silicon nanowires to the volume of …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Michael N. Miller
Priority date
February 17, 2011
Filing date
February 16, 2012
Publication date
August 23, 2012
Language
en
Metadata fetched
August 29, 2026 00:20