Fluorinated silazane release agents in nanoimprint lithography

Abstract

An imprint lithography release agent having general formula (1): where R 1 represents H or CH 3 , n is an integer from 1 to 5, and m is an integer from 1 to 40. Fluorinated silazanes of general formula (1) can be used to form a release layer on an imprint lithography template, added to an imprint …