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US20120257778A1

Differential microphone with sealed backside cavities and diaphragms coupled to …

University of Texas System

Abstract

A vacuum sealed directional microphone and methods for fabricating said vacuum sealed directional microphone. A vacuum sealed directional microphone includes a rocking structure coupled to two vacuum sealed diaphragms which are responsible for collecting incoming sound and deforming under sound …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Neal A. Hall
Priority date
April 08, 2011
Filing date
April 06, 2012
Publication date
October 11, 2012
Language
en
Metadata fetched
August 29, 2026 00:20