← All patents

US20130209757A1

Using chemical vapor deposited films to control domain orientation in block …

University of Texas System

Abstract

The present invention uses vacuum deposited thin films of material to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and influences the orientation of domains …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Carlton Grant Willson
Priority date
February 10, 2012
Filing date
February 07, 2013
Publication date
August 15, 2013
Language
en
Metadata fetched
August 29, 2026 00:21