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US20150054135A1

Self-aligned masks and methods of use

University of Texas System

Abstract

PRIORITY CLAIM This application claims priority under 35 U.S.C. §119 to U.S. Provisional Patent Application Ser. No. 61/868,883 filed Aug. 22, 2013. The contents of which are incorporated by reference herein in their entirety. TECHNICAL FIELD The present disclosure relates to self-aligned masks.

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Paul S. Ho
Priority date
August 22, 2013
Filing date
August 22, 2014
Publication date
February 26, 2015
Language
en
Metadata fetched
August 29, 2026 00:23