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US20150325439A1

Growing crystalline semiconductor oxide thin films on a substrate at a low …

University of Texas System

Abstract

A method for growing crystalline semiconductor oxide thin films. A substrate is coated with a conducting oxide (e.g., indium tin oxide). The coated substrate is immersed in a growth solution, such as a solution of a titanium-based sol-gel precursor combined with tetraethylene glycol. The coated …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Arumugam Manthiram
Priority date
December 14, 2012
Filing date
August 14, 2013
Publication date
November 12, 2015
Language
en
Metadata fetched
August 29, 2026 00:23