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US20170240681A1

Block Polymers for Sub-10 NM Patterning

University of Texas System

Abstract

The present invention relates to a method for the synthesis and utilization of block copolymer can that form sub-10 nm lamella nanostructures. Such methods have many uses including multiple applications in the semiconductor industry including production of templates for nanoimprint lithography.

University
University of Texas System
Assignee
Board Of Regents The University Of Texas System
Inventor
Carlton Grant Willson
Priority date
February 23, 2016
Filing date
February 22, 2017
Publication date
August 24, 2017
Language
en
Metadata fetched
August 29, 2026 00:25