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US20180348128A1

Lithographic systems and methods

University of Texas System

Abstract

CROSS-REFERENCE TO RELATED APPLICATIONS This application claims the benefit of U.S. Provisional Application No. 62/266,829, filed Dec. 14, 2015, which is hereby incorporated herein by reference in its entirety. BACKGROUND Lithography and chemical synthesis are two strategies for nanofabrication.

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Yuebing Zheng
Priority date
December 14, 2015
Filing date
December 13, 2016
Publication date
December 06, 2018
Language
en
Metadata fetched
August 29, 2026 00:25