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US20200087783A1

Patterning metal regions on metal oxide films/metal films by selective …

University of Texas System

Abstract

1 . A method for creating metal patterns, comprising: depositing a metal oxide film on a substrate in a reactor; feeding a reducing gas into said reactor; and pulsing a heat source to heat and form metal regions on said metal oxide film within a metal's reduction window. 2 . The method as recited in

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Roger Bonnecaze
Priority date
December 09, 2016
Filing date
December 06, 2017
Publication date
March 19, 2020
Language
en
Metadata fetched
August 29, 2026 00:27