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US20200244243A1

Graphene microelectromechanical system (mems) resonant gas sensor

University of Texas System

Abstract

A method of manufacturing a nanoelectromechanical resonator allows for uniform tuning of a resonant frequency. The nanoelectromechanical resonator can be mass produced and used to sense the presence of a selected gas.

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Michael CULLINAN
Priority date
September 26, 2017
Filing date
September 26, 2018
Publication date
July 30, 2020
Language
en
Metadata fetched
August 29, 2026 00:26