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US20220013417A1

System and method for modification of substrates

University of Texas System

Abstract

Various embodiments of the present technology generally relate to substrate planarization. More specifically, some embodiments of the present technology relate a versatile systems and methods for precision surface topography optimization known as planarization on nominally planar substrates. In …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Sidlgata V. Sreenivasan
Priority date
December 13, 2018
Filing date
December 13, 2019
Publication date
January 13, 2022
Language
en
Metadata fetched
August 29, 2026 00:29