← All patents

US20220130866A1

Silicon-On-Oxide-On-Silicon

University of Texas System

Abstract

Some embodiments of the present technology simplify the process of producing SOI wafers significantly compared to traditional methods. Furthermore, various embodiments provide a route for the integration of perovskite transition metal oxide thin films with different properties into SOI wafers. As …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Alexander A. Demkov
Priority date
March 04, 2019
Filing date
March 04, 2020
Publication date
April 28, 2022
Language
en
Metadata fetched
August 29, 2026 00:29