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US20230349068A1

Methods of depositing films with the same stoichiometric features as the source …

University of Texas System

Abstract

Methods for depositing films using crystals or powders as a source material are provided. The films can have a thickness of at least 100 nanometers and can be inorganic (e.g., inorganic perovskite) films, and the source material can be the same composition and/or stoichiometry as the deposited …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Manuel Quevedo Lopez
Priority date
August 26, 2020
Filing date
August 25, 2021
Publication date
November 02, 2023
Language
en
Metadata fetched
August 29, 2026 00:30