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US20250018093A1

Amorphous Silicon Oxide, Amorphous Silicon Oxynitride, and Amorphous Silicon …

University of Texas System

Abstract

1 . A device comprising at least one treated surface having a thin film comprising a nanoscale film or a macroscale film, said thin film comprising an amorphous silicon oxide (SiO x ), amorphous silicon nitride (SiN x ), or amorphous nitrogen enriched silicon oxide (SiON x ). 2 . The device of claim 1

University
University of Texas System
Assignee
Board Of Regents, University Of Texas System
Inventor
Venu Varanasi
Priority date
September 08, 2014
Filing date
September 30, 2024
Publication date
January 16, 2025
Language
en
Metadata fetched
August 29, 2026 00:33