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US20250183019A1

Programmable precision etching

University of Texas System

Abstract

A system and method for thinning a group of two or more dies. An etch gas chemistry is introduced into a plasma generator. Furthermore, plasma is generated using the etch gas chemistry by the plasma generator. The two or more dies placed within an etch chamber are then etched to thin the two or …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Sidlgata V. Sreenivasan
Priority date
February 28, 2022
Filing date
February 28, 2023
Publication date
June 05, 2025
Language
en
Metadata fetched
August 29, 2026 00:34