High resolution deposition and etching in polymer films

University of Texas System

University: University of Texas System
Assignee: Board Of Regents, The University Of Texas System
Inventor: Allen J. Bard
Priority date: November 03, 1988
Filing date: November 03, 1988
Grant date: November 06, 1990
Publication date: November 06, 1990
Language: en
PDF source: https://patentimages.storage.googleapis.com/ba/43/6a/98c2af813f11b4/US4968390.pdf
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