Method and apparatus for producing a layer of material from a laser ion source

University of Texas System

University: University of Texas System
Assignee: Board Of Regents, The University Of Texas System
Inventor: Suhas S. Wagal
Priority date: April 18, 1988
Filing date: April 18, 1988
Grant date: January 22, 1991
Publication date: January 22, 1991
Language: en
PDF source: https://patentimages.storage.googleapis.com/34/c5/ee/2f7fde102bc9f6/US4987007.pdf
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