Gas phase selective beam deposition

University of Texas System

University: University of Texas System
Assignee: Board Of Regents, The Uni. Of Texas System
Inventor: Harris L. Marcus
Priority date: December 04, 1989
Filing date: December 04, 1989
Grant date: May 21, 1991
Publication date: May 21, 1991
Language: en
PDF source: https://patentimages.storage.googleapis.com/57/fe/ad/be96d308164e05/US5017317.pdf
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