US5026575A

Growth of polycrystalline CaF2 via low temperature OMCVD

University of Texas System

Abstract

The present invention involves the use of organocalcium precursors for the chemical vapor deposition of thin CaF 2 films under exceptionally mild conditions. This method is based on utilizing an organocalcium compound and a source of fluorine in a chemical vapor deposition reaction to form CaF 2 .

University: University of Texas System
Assignee: Board Of Regents, The University Of Texas System
Inventor: Richard A. Jones
Priority date: July 11, 1989
Filing date: July 11, 1989
Grant date: June 25, 1991
Publication date: June 25, 1991
Language: en
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