Refractory effusion cell to generate a reproducible, uniform and ultra-pure …

University of Texas System

University: University of Texas System
Assignee: Board Of Regents, The University Of Texas System
Inventor: Ben G. Streetman
Priority date: August 29, 1989
Filing date: August 29, 1989
Grant date: July 23, 1991
Publication date: July 23, 1991
Language: en
PDF source: https://patentimages.storage.googleapis.com/d0/f0/0c/ec4629fd8ca092/US5034604.pdf
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