Method for forming hot-carrier suppressed sub-micron MISFET device

University of Texas System

University: University of Texas System
Assignee: The Board Of Regents, The University Of Texas System
Inventor: Hyungsoon Shin
Priority date: September 22, 1989
Filing date: February 14, 1991
Grant date: March 03, 1992
Publication date: March 03, 1992
Language: en
PDF source: https://patentimages.storage.googleapis.com/eb/26/08/9c228704ec0a3b/US5093275.pdf
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