Positioning, focusing and monitoring of gas phase selective beam deposition

University of Texas System

University: University of Texas System
Assignee: Board Of Regents The University Of Texas System
Inventor: Harris L. Marcus
Priority date: December 04, 1989
Filing date: March 15, 1991
Grant date: August 04, 1992
Publication date: August 04, 1992
Language: en
PDF source: https://patentimages.storage.googleapis.com/88/14/a6/84862f0ffa6136/US5135695.pdf
Metadata fetched: August 28, 2026 23:55