MOS transistor having improved oxynitride dielectric

University of Texas System

University: University of Texas System
Assignee: The Regents Of The University Of Texas System
Inventor: Dim-Lee Kwong
Priority date: January 07, 1994
Filing date: November 10, 1994
Grant date: July 30, 1996
Publication date: July 30, 1996
Language: en
PDF source: https://patentimages.storage.googleapis.com/45/64/6c/7d4813f93fc671/US5541436.pdf
Metadata fetched: August 28, 2026 23:55