Ultra thin dielectric for electronic devices and method of making same

University of Texas System

University: University of Texas System
Assignee: Regents Of The University Of Texas System
Inventor: Dim-Lee Kwong
Priority date: May 04, 1994
Filing date: September 18, 1995
Grant date: November 26, 1996
Publication date: November 26, 1996
Language: en
PDF source: https://patentimages.storage.googleapis.com/b9/f5/2a/f44d6ddf2e409b/US5578848.pdf
Metadata fetched: August 28, 2026 23:55