Molecular beam epitaxy effusion cell

University of Texas System

University: University of Texas System
Assignee: Board Of Regents, University Of Texas
Inventor: Terry J. Mattord
Priority date: June 10, 1997
Filing date: June 10, 1997
Grant date: January 04, 2000
Publication date: January 04, 2000
Language: en
PDF source: https://patentimages.storage.googleapis.com/4e/de/30/babd584cc0d0bc/US6011904.pdf
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