High density plasma source for semiconductor processing

University of Texas System

University: University of Texas System
Assignee: Board Of Regents, The University Of Texas System
Inventor: Marwan H. Khater
Priority date: November 19, 1997
Filing date: November 19, 1997
Grant date: February 22, 2000
Publication date: February 22, 2000
Language: en
PDF source: https://patentimages.storage.googleapis.com/7a/ba/bd/c26b2268c73526/US6028285.pdf
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