System for ion energy control during plasma processing

University of Texas System

University: University of Texas System
Assignee: Board Of Regents, The University Of Texas System
Inventor: Lawrence J. Overzet
Priority date: April 09, 1998
Filing date: April 09, 1998
Grant date: August 01, 2000
Publication date: August 01, 2000
Language: en
PDF source: https://patentimages.storage.googleapis.com/bf/5f/83/a073e40d7369ad/US6097157.pdf
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