Step and flash imprint lithography

University of Texas System

University: University of Texas System
Assignee: Board Of Regents, The University Of Texas System
Inventor: Carlton Grant Willson
Priority date: March 11, 1999
Filing date: March 11, 1999
Grant date: January 01, 2002
Publication date: January 01, 2002
Language: en
PDF source: https://patentimages.storage.googleapis.com/93/50/5d/c5d23e255164a7/US6334960.pdf
Metadata fetched: August 28, 2026 23:56