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US6719915B2

Step and flash imprint lithography

University of Texas System

Abstract

A method of forming a relief image in a structure comprising a substrate and a transfer layer formed thereon comprises covering the transfer layer with a polymerizable fluid composition, and then contacting the polymerizable fluid composition with a mold having a relief structure formed therein …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Carlton Grant Willson
Priority date
March 11, 1999
Filing date
July 19, 2001
Grant date
April 13, 2004
Publication date
April 13, 2004
Language
en
Metadata fetched
August 28, 2026 23:57