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US7504155B2

Suppression of chemical reactivity on semiconductor surfaces

University of Texas System

Abstract

The present invention relates generally to compositions, kits and methods of providing improved semiconductor surfaces free of dangling bonds and free of strained bonds. One method provides for preventing interfacial reactions between a semiconductor surface and metal or dielectric comprising the …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Meng Tao
Priority date
February 28, 2003
Filing date
April 12, 2004
Grant date
March 17, 2009
Publication date
March 17, 2009
Language
en
Metadata fetched
August 29, 2026 00:19