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US7534729B2

Modification of semiconductor surfaces in a liquid

University of Texas System

Abstract

Compositions and methods are provided herein that include modifications to at least one surface of a silicon-based semiconductor material. Modifications occur in a liquid and comprise alterations of surface states, passivation, cleaning and/or etching of the surface, thereby providing an improved …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Meng Tao
Priority date
February 28, 2003
Filing date
August 21, 2006
Grant date
May 19, 2009
Publication date
May 19, 2009
Language
en
Metadata fetched
August 29, 2026 00:19